Out-of-Plane Cmos Compatible Magnetometers
نویسندگان
چکیده
Three-dimensional MEMS magnetometers with use of residual stresses in thin multilayers cantilevers are presented. Half-loop cantilevers based on Lorentz-force deflection convert magnetic flux in V ∆ changes, thanks to piezoresistive transducers mounted in Wheatstone bridge. Magnetic field in the order of 10 Gauss was measured with a sensitivity of 0.015 mV/Gauss. A Finite Element Model of the device has been developed with Ansys for static and dynamic simulations. Novel out-ofplane ferromagnetic nickel plate magnetometer is also presented.
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ورودعنوان ژورنال:
- CoRR
دوره abs/0802.3077 شماره
صفحات -
تاریخ انتشار 2007